In the manufacturing process of SiC (silicon carbide) substrate, the cutting of SiC ingot is a crucial step. It not only directly determines the surface quality and dimensional accuracy of the substrate, but also has a decisive influence on …
With the continuous progress of semiconductor technology, silicon carbide (SiC), as a high-performance material, has shown great application potential in the field of power electronic devices. However, in the preparation process of silicon …
Silicon carbide substrate, as a new generation of semiconductor products, has shown great application potential in the field of power electronic devices because of its excellent physical and chemical properties. However, high efficiency and …